dc power supply dpg series

DPG-10-4AM

dc power supply

Dpg Series

They are made of reliable components and circuits. These highly reliable power generators have been optimized for plasma loads with a design that reflects our many years of knowledge that includes power generator applications.

features

  • Leight-weight/ Space-saving
    Light-weight and space-saving design with excellent installation flexibility.
  • Selectable output voltage range
    We feature a lineup with 800V specifications in addition 1000V specification.
  • Extensive arc handling
    Extensive arc control methods familiar with plasma.
  • Leight-weight/ Space-saving
    Light-weight and space-saving design with excellent installation flexibility.
  • Selectable output voltage range
    We feature a lineup with 800V specifications in addition 1000V specification.
  • Extensive arc handling
    Extensive arc control methods familiar with plasma.

applications

  • Flat panel display sputtering
  • Semiconductor sputtering
  • Touch panel sputtering
  • Industrial coating sputtering

applications

ModelDPG-10-AMDPG-10H-AMDPG-10-4AMDPG-20-AMDPG-20H-AMDPG-20-4AM
Input specificationRated input voltage3-Phase 187 to 229VAC3-Phase AC342 to 440V3-Phase 187 to 229VAC3-Phase AC342 to 440V
Input capacity13.5kVA or less25kVA or less
Output specificationMaximum rated power10kW20kW
Rated current25A18A25A50A40A50A
Rated voltage-800V-1000V-800V-800V-1000V-800V
Ignition voltage-1500V
Abnormal discharge controlShutoff by inverter stop or high-speed arc shutoff circuit*1 when abnormal discharge is detected
ControlControl methodConstant power control (P control)/constant current control (I control)/constant voltage control (V control)
Control precisionConstant power control (P Control):±0.5% or less of the rated output or ±1% of the set value, whichever is larger.
Constant current control (I Control):±1% or less of the rated output or ±2% of the set value, whichever is larger.
Constant voltage control (V Control):±1% or less of the rated output or ±2% of the set value, whichever is larger.
Control warranty scopeConstant power control, 10 to 100% of rated power value
Extenal interfaceanalog/digital,RS-232C or 485
Parallel operationUp to 12units can be controlled by master/slave communication
Cooling methodForced air-cooling
Dimension W×D×H483×630×133mm (excluding protrusions)
Weight29kg36kg
Applicable standardCE/ SEMI F47/ RoHS