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Basic Process Qulee BGM2 Series

Basic Process

Qulee BGM2 Series

“Qulee” (pronounced as “KLEE”), is ULVAC’s latest model for residual gas analysis. Feedback from
facility engineers in various production lines are incorporated in the new product design offering
utmost simplicity.(Ethernet compatible)

features

  • Excellent in Cost Performance
    Suitable for RGA application
  • Communication interface
    Ethernet compatible
  • Integrated Display
    No need for PC
  • Simple Operation
    “One Click” function
  • Bake Out
    Max 120℃ (248℉) high temperature bake (250℃ (482℉) when sensors are removed)
  • Degas Function
    Electron bombard degas
  • Protection and Maintenance Features
    Ion source and secondary electron multiplier protection maintenance help function
  • Various Leak Tests are Available
    Helium leak test, air leak test, leak up
  • Total Pressure Measurement
    Capable of total pressure measurement
  • Qulee QCS is Included
    This software is included and compatible with (Windows 7/8/10)
  • Applicable Standard
    Conforms with CE

applications

  • Residual gas analysis for organic electro luminescence
  • Residual gas monitoring for PV, FPD, and semiconductor manufacturing system
  • Residual gas analysis in PVD system and vacuum deposition
  • Residual gas analysis for high vacuum pumping equipment, etc.
  • Residual gas analysis for freeze drying system
  • Various types of gas analysis for research and development

specifications

  • Resolution M/△M=1M(10% P.H.)

    ModelBGM2-101BGM2-201BGM2-102BGM2-202
    Mass filter typeQuadrupole
    Mass range1～100 amu1～200 amu1～100 amu1～200 amu
    Detector typeFaraday cupEM tube
    Faraday cup
    Sensitivity10-7A/Pa4A/Pa
    Minimum detectable partial pressure10-8Pa10-12Pa
    Maximum operating pressure1×10-2Pa
    Total pressure functionCapable/10-2 ～ 10-5Pa
    One Click functionCapable /He/H2O/N2/O2/Any gas
    One Click leak test functionCapable
    Power inputDC24V±10％　50W
    Maximum sensor operating temperature120℃ (248℉)
    Maximum bakeout temperature (electronics removed)250℃ (482℉)
    Operating temperature range10 to 40℃ (50 to 104℉)
    SoftwareQulee QCS Ver.4.0 later (Windows 7/8/10)
    Applicable standardCE