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High Pressure Process Qulee CGM2 Series

High Pressure Process

CGM2 Series

“Qulee” (pronounced as “KLEE”), is ULVAC’s latest model for residual gas analysis and gas monitoring during process. Feedback from facility engineers in various production lines are incorporated in the new product design offering utmost simplicity.
The Qulee offers high accuracy and resolution even at high pressure (1Pa or less).

features

  • Ideal for process monitoring of various sputtering sysytem
  • No differential pumping system required (at 1Pa (7.5×10-3 Torr / 1×10-2 mbar) lower)
  • Integrated Display: No need for PC
  • Simple Operation: “One Click” function
  • Max 120℃ (248℉) high temperature bake (250℃ (482℉) when sensors are removed)
  • Electron bombard degas
  • Ion source and secondary electron multiplier protection maintenance help function
  • Traceability of analysis tube (patent pending)
  • Various Leak Tests are Available (Helium leak test, air leak test, built-up test)
  • Capable of total pressure measurement (ionization gauge)
  • Qulee QCS is Included:
    This software is included and compatible with (Windows 8/10)
  • QIP (Quick Install Package system) is Included:
    Auto measuring package (refer to options catalog for details)
  • Conforms with CE
  •  

applications

  • Process monitoring for PV, FPD, and semiconductor system
  • Residual gas analysis in PVD system
  • Impurities (H2O, etc.) control in PVD system
  • For leak testing

specifications

ModelCGM2-051CGM2-052
Mass filter typeQuadrupole
Mass range1 to 50 amu
ResolutionM/ΔM=1M (10% P.H.)
Detector typeFaraday cup (FC)EM Tube (SEM) / Faraday cup (FC)
Sensitivity10⁻⁷ A/PaSEM:10⁻⁴ A/Pa
1.33×10⁻⁵ A/TorrSEM:1.33×10⁻² A/Torr
10⁻⁵ A/mbarSEM:10⁻² A/mbar
Minimum detectable partial pressure1×10⁻⁷ PaSEM:1×10-10 Pa
7.5×10-10 TorrSEM:7.5×10-13 Torr
1×10⁻⁹ mbarSEM:1×10-12 mbar
Maximum operating pressureFC:2 Pa

FC:2, SEM:1×10⁻² Pa

FC:1.5×10⁻² TorrFC:1.5×10⁻² SEM:7.5×10⁻⁵ Torr
FC:2×10⁻² mbarFC:2×10⁻² SEM:1×10⁻⁴ mbar
Linearity1Pa
7.5×10⁻³ Torr
1×10⁻² mbar
Filamentlr/Y₂O₂
Ionzing voltage40eV
Emission current0.1mA/0.4mA
DegasElectron bombard type 300V,5mA
Total pressure functionCapable
One Click functionCapable/He/H₂O/N₂/O₂/Any gas
One Click leak test functionCapable
Power inputDC24V ±10% 50W
Weight(Sensor unit/sensor)2.1kg/0.44kg2.2kg/0.44kg
Maximum sensor operating temperature120℃(248℉)

Maximum bakeout temperature

(electronics removed)

250℃(482℉)
Operating temperature range10 to 40℃ (50 to 104℉)
Operating humidity range15 to 80% (not condensing)
IP ratingIP30 (sensor unit)
Power connectorMSTB2.5/3-STF-5.08
Communication interfaceRS232C/RS485 (with option)
External input/output connectorD-sub15-pin (M2.6 screw)
Communication connectorRJ-45
External input/output signalAnalog input(0 to 10V)×2,External interlock input(pressure protection)×1,Partial pressure setpoint output ×2(fault,alarm),Total pressure setpoint output ×1
SoftwareQulee QCS Ver. 4.0 later (Windows 8/10)
Standard accessoriesPower connector,Communication cable(3m long),Software(install CD),Instruction manual(clean paper)

Optional accessories

(Cf. Qulee optional catalogue)

QIP(Auto-measuring package spec.),Communication cable(5m,10m,15m long),AC Power adapter,USB-LAN adapter,Swinting hub(8 ports or 16ports),Input / output connecter,Jacket heater,Carry case
Applicable standardCE

※When there is no RS232C port in PC,please purchase USB/RS232C micro converter of option.

※Please prepare an AC/DC power supply or please purchase the AC/DC adapter of an option.