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High Performance Process Qulee HGM2 Series

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High Performance Process Qulee HGM2 Series

Qulee HGM2 Series

ULVAC’s new “Qulee HGM2” residual gas analyzer series with revolutionary simplicity of use.
Offers highest sensitivity of all models at 2.5 × 10 -6A/Pa, Qulee HGM2.
Can meet the needs of various R&D and other vacuum system proce ss monitoring.(Ethernet compatible)

features

  • Most Appropriate for R&D Applications
    Offers highest sensitivity 2.5×10-6A/Pa (3.3×10-4A/Torr, 2.5×10-4A/mbar）
  • Communication interface Ethernet compatible
  • Integrated Display No need for PC
  • Simple Operation “One Click” function
  • Bake Out
    Max 250℃ (482℉) high temperature bake (300℃ (572℉) when the sensors are removed)
  • Degas Function　Electron bombard degas
  • Maintenance
    Filament, ion source, and secondary electron multiplier are easy to replace
  • Protection and Maintenance Features
    Unit offers protection and maintenance of ion source and secondary electron multiplier Traceability of analysis tube (Japanese Patent No. 5016031)
  • Various Leak Tests are Available
    Helium leak test, air leak test, leak up
  • Total Pressure Measurement
    Capable of total pressure measurement (ionization gauge)
  • Qulee QCS is Included
    This software is included and compatible with (Windows 7/8/10)
  • Applicable Standard　Conforms with CE

applications

  • R&D such as thermal desorption gas analysis
  • Residual gas analysis for ultra-high vacuum pumping equipment, etc
  • Trace impurities in gas
  • R&D for photovoltaic field
  • Analysis of organic compound
  • Environmental measurements

applications

ModelHGM2-202HGM2-302
Mass filter typeQuadrupole
Mass range1 ~ 200 amu1 ~ 300 amu
ResolutionM/ ΔM=1M(10% P.H.)
Detector typeFaraday cupSEMFaraday cupSEM
Sensitivity2.5×10⁻⁶ A/Pa4 A/Pa2.0×10⁻⁶ A/Pa4 A/Pa
3.3×10⁻⁴ A/Torr533 A/Torr3.3×10⁻⁴ A/Torr533 A/Torr
2.5×10⁻⁴ A/mbar400 A/mbar2.5×10⁻⁴ A/mbar400 A/mbar

Minimum datectable partial pressure

Approx. 10⁻⁹ PaApprox. 10-13PaApprox. 10⁻⁹ PaApprox. 10-13Pa
Approx. 7.5×10-12 TorrApprox. 7.5×10-16 TorrApprox. 7.5×10-12 TorrApprox. 7.5×10-16 Torr
Approx. 1×10-11 mbarApprox. 1×10-12 mbarApprox. 1×10-11 mbarApprox. 1×10-12 mbar
Maximum operating pressure1×10⁻²Pa
7.5×10⁻³ Torr
1×10⁻⁴ mbar
Filamentlr / Y₂O₃, 2pcs
Ionizing voltage25 ~ 70 eV(defalut:70eV)
Emission current0.1mA/0.5mA/1.0mA(default:0.5mA)
DEGASElectron bombard type 330V, 5mA
Total pressure functionCapable / 10⁻² ~ 10⁻⁵Pa
“One Click” functionCapable / He/H₂O/N₂/O₂/Any gas
“One Click” leak test functionCapable
Power inputDC24V±10% 50W
Weight(sensor unit / sensor)2.4kg/0.81kg
Maximum sensor operating temperature250℃(482℉)

Maximum bakeout temperature

(elsectronisc removed)

300℃(572℉)
Operating temperature range10 to 40℃(50 to 104℉)
Operating humigity range15 ~ 80%(not condensing)
IP ratingIP30(sensor unit)
Power connectorMSTBV2.5/3-STF-5.08
Communication interfaceEthernet compatible
External input / output connectorD-sub15-pin (M2.6 screw)(eith option)
Communication connectorRJ45
External input / output signalAnalog input (0 to 10V)×2,External interlock input (pressure protection)×1,Error output ×1(FIL,SEM,RF,fault),Partial pressure setpoint output ×2(fault,alarm),Total pressure setpoint output ×1
SoftwareQulee QCS Ver.4.0 later (Windows 7/8/10)
Standard accessoriesPower connector,Communication cable (3m long),Software (install CD),Instruction manual (CD)

Option accessories

(cf. Qulee optional catalogue)

Communication cable (10,15,20,30,50m long), AC power adapter, USB-LAN adapter, Switing hub(8ports or 16ports), Input / output connector, Jacket heater, Carry case
Applicable standardCE

※Please prepare an AC/DC power supply or please purchase the AC/DC adapter of an option.