ULVAC offers the superior dry pump series for all semiconductor and FPD manufacturing processes. The LR/HR/UR series have high durability in the hard processes of CVD, etching etc.
dry vacuum pump
LS Series
LR/HR Series
ECO-SHOCK Series
GR Series
CR Series
DAP/DA/DAT Series
DTC Series (Small)
DIS/DISL Series (Small)
DAU/DTU Series (Small)
DOP Series (Small)
oil rotary vacuum pump
VS650A/VS750A Series
VS/VSN Series
PKS Series
VD/VDN Series
PVD/PVD-N Series
GCD Series (Small)
GHD Series (Small)
GLD Series (Small)
mechanical booster pump
MBS Series (Small)
PMB Series
PRC Series
PMB-C Series
oil diffusion pump
ULK Series
PFL Series
PBL Series
turbo molecular pump
UTM-FW / FH
UTM-MI
UTM-B Series
YTP Series
cryo pump
Cryo Pump
ion pump
Sputter Ion Pump PST Series
Controller for PST
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