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Oil Diffusion Pump ULK Series

Oil Diffusion Pump ULK Series

ULK-type oil diffusion pump is a compact high vacuum pump designed with high critical back pressure.It is used in a wide range of applications, from research to manufacturing line.

features

  • Designed for large critical back-pressure
  • Extremely stable performance at pressures down to 10-2 Pa (10-4 torr)
  • Use hose flanges (except for vent flanges on ULK-04A and 06A)
  • Pumps can be cleaned easily (parts can be disassembled easily).
  • Come with mechanism to stop flow of operating fluid to auxiliary pump.

specifications

ModelULK-04AULK-06AULK-10AULK-14A
Pumping speed(L/sec)550500120011003400300054004900
Ultimate pressure(Pa)*1＜2.6×10-5＜2.6×10-6＜2.6×10-5＜2.6×10-6＜2.6×10-5＜2.6×10-6＜2.6×10-5＜2.6×10-6
Maxium forepressure(Pa)4060406035403030
Heating up time(min)98.516.51520202525
Oil*4ULVOIL D-11ULVOIL D-31ULVOIL D-11ULVOIL D-31ULVOIL D-11ULVOIL D-31ULVOIL D-11ULVOIL D-31
Oil capacity(L)0.150.350.81.5
Cooling water temperature(℃)19℃～25℃
Water connectionsRc　1/4″Rc　1/4″Rc　3/8″Rc　3/8″
Water capacity(L／min)1111.52.532.53.5
Voltage200V/1Φ
Pump power(kW)0.550.730.91.222.42.252.4
Heater typePlatePlatePlatePlate
Standard backing pump*2VD151/VD201
PVD-180/PVD-360		VD30C/VD40C/VD60CVD90C
VS1501
PKS-016/PKS-030		VS1501/VS2401/PKS-030
Dimensions*3(mm)A175250340340
B150180240240
H344449650670
InletVG100VG150VG250VG350
OutletVG25VG40VG80VG80
Weight(kg)7.513.54756
Oil level gageWithoutWithoutSlight glassSlight glass
Themal switch optionWithWithWithWith
Themal switch operating temperature(℃)250250180180

*1 The ultimate pressure by an ionization gauge in the case of coolant temperature 20 degrees Ceisius.
*2 The backing pump chooses it for the maximum throughput of the diffusion ejector pump,but,in consideration of time of starting pressure,it is good to use a big backing pump.
*3 Please confirm other dimensions by CAD data placing in the ULVAC,Inc.website.
*4　D-11 is hydrocarbon-based general-purpose oil.D-31 is the silicon-based diffusion pump oil which heat-resistant stability is high in.