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Turbo Molecular Pump UTM-MI Series

Turbo Molecular Pump UTM-MI Series

Controller integrated turbo molecular pump with magnetic bearings saves wiring work and installation space.

features

  • Controller integrated with the pump body No wiring work between pump body and controller.
  • Free mounting direction Free mounting direction makes the system design flexible.
  • 5 models from 1000L/s to 4000L/s class.
  • Wide range and high flow for the light processes.
  • Pump rotation variable from 25% to 100% Enabling the pressure adjustment in a chamber.
  • High durability and safety Safety confirmation tests are passed, such as air rushing-in test and touch down test.

applications

  • Semiconductor equipment
  • Evaporator,Sputtering system
  • Analytical equipment
  • Experimental device
  • Main vacuum pumping system for the light processes that do not generate side reaction products.
  • Replacement from oil diffusion pumps
  • General use for high vacuum evacuation system.

Specifications

ModelUTM1200AUTM1600AUTM2300AUTM3400A
Inlet portVG150
ISO160F		VG200/VG250
ISO200F/ISO250F		VG250
ISO250F		VG300/VG350
ISO320F
Outlet portKF40
Ultimate pressure(*1)Pa10-7
Pumping speed (*2)(*3)N2L/s1030140021003200
ArL/s980133020003100
H2L/s66075013802100
Compression rateN22×108≧ 1×108≧ 1×109
He7×1035×1031×105
H28×1029×1026×103
Max inlet pressure(*4)Pa264.57
Max outlet pressure(*4)Pa266200270
Rotation speedmin-1372003370027600
Speed variationSpeed is variable between 25% and 100% of the rated speed.（ set as 0.1%）
Start-up time≦ 8minutes≦ 9minutes≦ 16minutes
Mounting positionIn any desired direction
Surface treatment(*5)None
Commun icationContactD-sub 25 pin female Contact input and output signalD-sub 37 pin female Contact input and output signal
SerialSerial connecter RS232C/RS485D-sub 9 pin male RS232C/RS485
ControllerCompositionPump with integrated controller
Input electric powerSingle phase AC200 〜240V ±10%（ 50/60Hz ±2Hz）
Max power0.75kVA1.2kVA
Cooling methodWater cooled
Cooling water(*6)Flow rateL/min3～4
PressureMPaG0.2 ～ 0.4
NoisedB(A)5760
Weightkg43415694
Recommended backing pump(*7)≧ 600L/min≧ 1500L/min
Applicable standardCE、TUVus
Standard accessoriesO-ring(Only VG)、Dust cap(Outlet port)、Remote-control Connector、Instruction manual(CD-ROM)　
Select partsAC CableAC Conector / AC Cable(5m/10m/15m/20m)
Special bolt for fixing pumpM10(Non-RoHS / RoHS)/ M12(Non-RoHS / RoHS)
Special bolt for fixing pumpNeed（M10）（*8）Not Need（*8）
OptionGas purge adaptor (KF10)

*1：digit number is expressed.
*2：Without a protective net.
*3：Calculated values:UTM2300A and UTM3400A　
*4：Max inlet pressure and Max outlet pressure cannot be satisfied at same time.
*5：Do not flow reactive gas and corrosive gas. Please contact us when using other gases.
*6：Not condensing　
*7：When evacuating 30SCCM　
*8：Grade of bolts,Fixing method and etc. are subject to various conditions. Please contact us for the detailed information.