High-temp Ion Implanter for SiC IH-860DSIC

High-temp Ion Implanter for SiC

IH-860DSIC Series

Ion Implanter for mass production with high temp ESC for SiC.

features

  • Continuous high-temp implantation
  • Up to 700keV
  • Chain implantation by software
  • Small footprint
  • From R&D to mass production

applications

  • SiC devices